Semiconductors

Application

Grade

CZ method for pulling SiC crystals

Heaters

Crucibles

Heating plates and other components

G330S

G458S

G330S, G347S

Zone-refining boats

Sensible parts for epitaxy

CVD plasma components

For treatment of other components for semiconductor plates

G347, G530, G535

G530S, G535S

SiC coated graphite

G347S, G530S, G535S

G347S,G530S, G535S



Note:

  1. Code, stated after the graphite grade points to different level of refining.

e.g. G347 (Standard ash level)

G347S (ash content 20ppm max)

Grade

Density, g/cm2

Unit-area Resistance, mW

Young’s Modulus,

kgs/mm2

Flexural Strength,

Kgs/cm2

Hardness (Shore)

C.T.E,

x10-6/ 0

Thermal Conductiuvity

W/mK

Graphite Rods’ Sizes,

G330

1.79

13.0

1000

400

56

4.8

104

311x622x1245

311x622x2146

D405x730

D460x700

D500x790

D550x675

D610x640

G347

1.85

11.0

1100

500

58

5.5

116

234x649x800

311x622x1245

270x1200x1200

D340x920

D380x1060

D460x700

D515x800

D560x680

D610x640

G348

1.92

10.0

1255

650

68

5.5

128

165x398x1900

175x690x800

250x390x960

G530

1.82

13.0

1150

630

64

5.5

104

217x597x742

235x467x1245

G535

1.82

17.0

1100

650

72

5.5

81

230x455x1245



Application

ppm

Standard

300 (generally)

Refined (S type)

20 (max)

Super-refind (SS type)

5 (max)