Semiconductors |
 |
|
Application |
Grade |
|
CZ method for pulling SiC crystals Heaters Crucibles Heating plates and other components |
G330S G458S G330S, G347S |
|
Zone-refining boats Sensible parts for epitaxy
CVD plasma components For treatment of other components for semiconductor plates |
G347, G530, G535 G530S, G535S SiC coated graphite G347S, G530S, G535S
G347S,G530S, G535S |
Note:
- Code, stated after the graphite grade points to different level of refining.
e.g. G347 (Standard ash level)
G347S
(ash content 20ppm max)
|
Grade |
Density, g/cm2 |
Unit-area Resistance, mWì |
Young’s Modulus, kgs/mm2 |
Flexural Strength, Kgs/cm2 |
Hardness (Shore) |
C.T.E, x10-6/ 0Ñ |
Thermal Conductiuvity W/mK |
Graphite Rods’ Sizes, ìì |
G330 |
1.79 |
13.0 |
1000 |
400 |
56 |
4.8 |
104 |
311x622x1245 311x622x2146 D405x730 D460x700 D500x790 D550x675 D610x640 |
|
G347 |
1.85 |
11.0 |
1100 |
500 |
58 |
5.5 |
116 |
234x649x800 311x622x1245 270x1200x1200 D340x920 D380x1060 D460x700 D515x800 D560x680 D610x640 |
|
G348 |
1.92 |
10.0 |
1255 |
650 |
68 |
5.5 |
128 |
165x398x1900 175x690x800 250x390x960 |
|
G530 |
1.82 |
13.0 |
1150 |
630 |
64 |
5.5 |
104 |
217x597x742 235x467x1245 |
|
G535 |
1.82 |
17.0 |
1100 |
650 |
72 |
5.5 |
81 |
230x455x1245 |
|
Application |
ppm |
|
Standard |
300 (generally) |
|
Refined (S type) |
20 (max) |
|
Super-refind (SS type) |
5 (max) |